Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationApplication of combined low and high energy ion assistance for film formation and stress relaxation of cBN thin films
Kolitsch, A.; Abendroth, B.; Gago, R.; Fitz, R.; Möller, W.
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Invited lecture (Conferences)
IV International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2004, 14.-17.04.2004, Kazimierz Dolny, Poland
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