Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationAFM characterization of 6H-SiC surfaces after ion implantation and annealing
Brauer, G.; Brandstetter, S.; Teichert, C.; Anwand, W.; Skorupa, W.
Abstract
6H-SiC surfaces after ion implantation and annealing are characterized by AFM.
Keywords: AFM; SiC surface; ion implantation; annealing
-
Lecture (Conference)
18th International conference on the application of accelerators in research and industry (CAARI2004), 10.-15.10.2004, Ft. Worth/TX, USA
Permalink: https://www.hzdr.de/publications/Publ-9895