IBC Overview - Methods & Instrumentation
The ion beam center (IBC) at HZDR combines various machines (electrostatic accelerators, ion implanters, other ion- and plasma-based equipment) into an unique facility mainly used for ion beam modification and ion beam analysis of materials. The available energy range varies from 10 eV to almost 100 MeV with a respective interaction depth in solids between 0.1 nm and 10 µm. In addition to standard broad beams also focused (down to 1 nm) and highly-charged (charge state up to 45+) ions are provided.
A schematic overview of the IBC is shown on the following figure:
Experimental stations offered for user access are indicated by numbers in the floor plan. More details about the various techniques available at these endstations are given in the table below. For technical details please contact the responsible scientist or have a look at the correspondig equipment pages.
Ion Beam Modification
Application / Method | GATE Beamline |
Acronym | Machine | Endstation(s) | Local Contact |
---|---|---|---|---|---|
Ion Implantation | Ion Implantation / Irradiation | II | 40 kV Implanter | 16 | U. Kentsch |
500 kV Implanter | 17, 18 | ||||
3 MV Tandem | 12 | S. Akhmadaliev | |||
3 MV Tandem | 14, 15 | ||||
6 MV Tandem | 3, B1 | ||||
Ga FIB | FIB Experiments | FIB | NVision 40 | F1 | G. Hlawacek |
Mass-Separated FIB | FIB | IMSA-100 | F2 | ||
He / Ne Ion Microscope | IM | ORION NanoFab | F3 | ||
Low-Energy Ion Irradiation | LEI/HCI Experiments | LEI | Various | \ | S. Facsko |
Highly-Charged Ion Experiments | HCI | \ |
Ion Beam Analysis
Application / Method | GATE Beamline |
Acronym | Machine | Endstation(s) | Local Contact |
---|---|---|---|---|---|
RBS-Standard-RBS + Channelling | Ion Beam Analysis | RBS/C | 2 MV van de Graaff | A1, A2 | R. Heller |
Heavy-Ion RBS | HI-RBS | 3 MV Tandem | 11 | ||
Analytical Ion Microprobe | Analytical Ion Microprobe | IMP | 13 | ||
Nuclear Reaction Analysis | Ion Beam Analysis | NRA | 3 / 6 MV Tandem | 1, 13 | |
Elastic Recoil Detection Analysis | ERDA | 6 MV Tandem | 2 | ||
in-situ IBA | ISIBA | 9 | |||
External Proton Beam | External Proton Beam | ExtB | 5 | ||
Accelerator Mass Spectrometry | Accelerator Mass Spectrometry | AMS | B2 | T. Wallner |