Dr. Stefan Facsko

Head of Ion Beam Center
Phone: +49 351 260 2987

IBC Overview - Methods & Instrumentation

The ion beam center (IBC) at HZDR combines various machines (electrostatic accelerators, ion implanters, other ion- and plasma-based equipment) into an unique facility mainly used for ion beam modification and ion beam analysis of materials. The available energy range varies from 10 eV to almost 100 MeV with a respective interaction depth in solids between 0.1 nm and 10 µm. In addition to standard broad beams also focused (down to 1 nm) and highly-charged (charge state up to 45+) ions are provided.

A schematic overview of the IBC is shown on the following figure:

IBC overview 2021

Experimental stations offered for user access are indicated by numbers in the floor plan. More details about the various techniques available at these endstations are given in the table below. For technical details please contact the responsible scientist or have a look at the correspondig equipment pages.

Ion Beam Modification

Application / Method GATE
Acronym Machine End­station(s) Local
Ion Implantation Ion Implantation / Irradiation II 40 kV Implanter 16 U. Kentsch
500 kV Implanter 17, 18
3 MV Tandem 12 S. Akhmadaliev
3 MV Tandem 14, 15
6 MV Tandem 3, B1
Ga FIB FIB Experiments FIB NVision 40 F1 G. Hlawacek
Mass-Separated FIB FIB IMSA-100 F2
He / Ne Ion Microscope IM ORION NanoFab F3
Low-Energy Ion Irradiation LEI/HCI Experiments LEI Various \ S. Facsko
Highly-Charged Ion Experiments HCI   \

Ion Beam Analysis

Application / Method GATE
Acronym Machine End­station(s) Local
RBS-Standard-RBS + Channelling Ion Beam Analysis RBS/C 2 MV van de Graaff A1, A2 R. Heller
Heavy-Ion RBS HI-RBS 3 MV Tandem 11
Analytical Ion Microprobe Analytical Ion Microprobe IMP 13
Nuclear Reaction Analysis Ion Beam Analysis NRA 3 / 6 MV Tandem 1, 13
Elastic Recoil Detection Analysis ERDA 6 MV Tandem 2
in-situ IBA ISIBA 9
External Proton Beam External Proton Beam ExtB 5
Accelerator Mass Spectrometry Accelerator Mass Spectrometry AMS B2 T. Wallner