Ion Induced Nanostructures

We study processes during the interaction of low energy (10 eV – 50 keV) ions with different charge states with materials, especially for the controlled modification and nano-patterning of their surfaces. Such modifications can be material removal through sputtering of surface atoms but also near surface ion beam mixing, ion beam induced defect engineering, or implantation of guest atoms (see figure below). Bottom up as well as top down surface structuring can be achieved through the use of either broad beam irradiation or focused ion beam irradiation.

The first one allows to roughen, smoothen, or clean technical surfaces. Furthermore, the energy deposited by the continuous ion impact drives the surface out of equilibrium inducing many processes on the surface and the sub-surface region.


Ioneninduzierte Oberflächenprozesse Alternatively, focused ion beams allow the top down structuring of surfaces or surface near regions with a high spatial resolution compatible with modern nanostructure fabrication requirements. In our group we employ a wide range of focused ion beams from very light nobel gas ions to small heavy ion clusters to understand the behaviour of materials and create state-of-the-art nanostructures.


Our main research topics are: 

Siliziumoberfläche nach 500 eV Ar+ Sputtern unter 67° 3D AFM Bild von CaF2 Pits HIM Trimer

Internal Information

Recent publications


Sputtering of nanostructured tungsten and comparison to modelling with TRI3DYN

R. Stadlmayr, P. S. Szabo, D. Mayer, C. Cupak, T. Dittmar, L. BischoffORC, S. Möller, M. Rasinski, R. A. WilhelmORC, W. Möller, F. Aumayr


  • available with HZDR-Login
  • Secondary publication expected from 07.02.2021


Morphology modification of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm

X. XuORC, K.-H. Heinig, W. Möller, H.-J. Engelmann, N. KlingnerORC, A. Gharbi, R. Tiron, J. Borany, G. HlawacekORC


Strain Anisotropy and Magnetic Domains in Embedded Nanomagnets

M. Nord, A. Semisalova, A. Kákay, G. HlawacekORC, I. Maclaren, V. Liersch, O. Volkov, D. Makarov, G. W. Paterson, K. Potzger, J. Lindner, J. FaßbenderORC, D. Mcgrouther, R. Bali


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Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns

M. Mousley, S. Eswara, O. de Castro, O. Bouton, N. KlingnerORC, C. T. Koch, G. HlawacekORC, T. Wirtz


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Lithium Ion Beams from Liquid Metal Alloy Ion Sources

W. Pilz, P. Mazarov, N. Klingner, S. Bauerdick, L. Bischoff


Time-of-flight secondary ion mass spectrometry in the helium ion microscope

N. KlingnerORC, R. Heller, G. HlawacekORC, S. FacskoORC, J. von Borany



Dr. Gregor Hlawacek

Ion Microscopy
Ion Induced Nanostructures
Phone: +49 351 260 3409