Dr. René Hübner

Head Structural Analysis
Electron Microscopy Laboratory
Phone: +49 351 260 3174

Analytical Scanning Electron Microscopy (SEM)

REM © Dr. R. Hübner

REM. Foto: René Hübner



  • High-resolution scanning electron microscope Hitachi S-4800 (max. 30 kV)
  • Microanalysis system for Energy Dispersive X-ray Spectroscopy (EDXS): Si(Li) detector with S-UTW-window (INCA, Oxford Instruments), element detection for Z ≥ 5)

Application fields 

The scanning electron microscope is applied for multiple investigations and analyses of surfaces, contaminations, and fracture surfaces. It is used by all institutes of the HZDR and open for external partners, too.

Some examples are:

  • Surface modifications caused by ion implantation
  • Analysis of structures written by a focused ion beam
  • Analysis of ion beam deposited thin layers
  • Element distribution on polished rocks
  • Shape and size of aerosol particles
  • Investigation of nuclear track filters
  • Examination of colloidal particles in mining water
  • Investigation of bacteria

EDXS enables the chemical-analytic identification of microscopic inclusions, phases, and inhomogeneities. Quantitative element analysis of single points (minimum size 1-2 µm), lines, or areas is possible. The information depth amounts up to some micrometers.