Analytical Scanning Electron Microscopy (SEM)

Equipment

• High-resolution scanning electron microscope Hitachi S-4800 (max. 30 kV)
• Microanalysis system for Energy Dispersive X-ray Spectroscopy (EDXS): Si(Li) detector with S-UTW-window (INCA, Oxford Instruments), element detection for Z ≥ 5)

Application fields 

The scanning electron microscope is applied for multiple investigations and analyses of surfaces, contaminations, and fracture surfaces. It is used by all institutes of the HZDR and open for external partners, too.

Some examples are:

• Surface modifications caused by ion implantation
• Analysis of structures written by a focused ion beam
• Characterization of deposited thin layers
• Analysis of semiconductor devices
• Element distribution on polished rocks
• Shape and size of aerosol particles
• Investigation of bacteria
• Examination of colloidal particles in mining water

EDXS enables the chemical-analytic identification of microscopic inclusions, phases, and inhomogeneities. Quantitative element analysis of single points (minimum size 1-2 µm), lines, or areas is possible. The information depth amounts up to some micrometers.