Contact
Dr. Nico Klingner
Focused Ion Beams (FIB) including SEM, LMAIS, GFIS (HIM) and ECR Plasma
n.klingner
hzdr.de
Phone: +49 351 260 2524
+49 351 260 3676
Dr. Lothar Bischoff
Nanostructures by focused electrons and ions
Liquid Metal Alloy Ion Sources
Ion Induced Nanostructures
l.bischoffhzdr.de
Phone: +49 351 260 2866
+49 351 260 2963
Introduction
Focused ion beams (FIB) are promising tools in micro- and nanotechnology as well as in material analytics. Characteristic properties are the Nanometer spot size, the energy range from some eV up to 200 keV, the high current density and a broad spectrum of ion species. In commercial FIB systems Ga liquid metal ion sources (LMIS) are usually employed, but in some rare cases also liquid metal alloy ion sources (LMAIS) are used. FIB systems allow to create structures of arbitrary shape with dimensions on the nm scale.
Loading of liquid metal alloy ion source emitter with liquid Gold-Silicon alloy.
Emission test of a gold-silicon liquid metal alloy ion source
Production
Periodic table of elements with elements available in a FIB
The ion fine beam laboratory in the institute has equipment and extensive experience for the development and production of liquid metal hairpin-type ion sources for different source materials like :
Au73Ge27, Au82Si18, Ce80C20, Co36Nd64, Er69Ni31, Sn74Pb26, In14Ga86, Ga38Bi62, Ga35Bi60Li5 as well as new sources on demand ...
Test und characterization
The following parameters are determined for the test and characterisation of the sources:
- current-voltage characteristics, emission stability, lifetime and emitter-temperature behaviour, long-term stability.
- Mass spectra
- Angular distribution and angular intensity by means of a rotating Faraday cylinder
- Ion energy distribution as well as energy shift of each emitted component of the source through a mass filter and a retarding field energy analyzer
Instrumentation
- Carl Zeiss NVision 40 CrossBeam Ga-FIB for standard applications like ion beam lithography or TEM lamella preparation
- 2x Orsay Physics CANION Z31Mplus mass-separated FIBs (semi-commercial), which can provide various ion species using in-house developed ion sources, for dedicated research Topics
- Carl Zeiss ORION NanoFab, 2x Carl Zeiss ORION Plus Helium Ion Microscope He/Ne-FIB
- Hitachi Ion Milling System ArBlade 5000 for sample crosssectioning, 500µA of 10 keV Ar, sputtering of > 1 mm / h
- Leica EM TXP Target Surfacing System for target preparation like milling, sawing, grinding, and polishing of samples with an integrated stereomicroscope
Current projects
Gallium Oxide Fabrication with Ion Beams GoFIB (05/2022 – 05/2025)
GoFIB (Reference Number: project9659), press release
Gallium oxide is a novel ultra-wide band gap material, and the rationale is that its thin film fabrication technology is immature. In particular, the metastability conditions are difficult to control during sequential deposition of different polymorphs with existing techniques. However, the polymorphism may turn into a significant advantage if one can gain control over the polymorph multilayer and nanostructure design. Our objective is to develop a method for the controllable solid state polymorph conversion of gallium oxide assisted by ion irradiation, capitalizing on encouraging preliminary data. This fabrication method may pave the way for several potential applications (e.g. in power electronics, optoelectronics, thermoelectricity, batteries) and we will test the corresponding functionalities during the project. Thus, we envisage multiple positive impacts and potential benefits across a wide range of stakeholders.
Former Projects
All publications
Recent publications
2022
Wafer-scale nanofabrication of telecom single-photon emitters in silicon
M. Hollenbach, N. Klingner, N. Jagtap, L. Bischoff, C. Fowley, U. Kentsch, G. Hlawacek, A. Erbe, N. V. Abrosimov, M. Helm, Y. Berencen, G. Astakhov
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 35071) publication
Differential evolution optimization of Rutherford back-scattering spectra
R. Heller, N. Klingner, N. Claessens, C. Merckling, J. Meersschaut
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 34563) publication
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Syntetic Spectra Data used in publication "Differential evolution optimization …
ROBIS: 34545 HZDR-primary research data are used by this (Id 34563) publication
Epitaxial lateral overgrowth of tin spheres driven and directly observed by helium ion microscopy
N. Klingner, K.-H. Heinig, D. Tucholski, W. Möller, R. Hübner, L. Bischoff, G. Hlawacek, S. Facsko
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 34525) publication
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Data publication: Epitaxial lateral overgrowth of tin spheres driven and …
ROBIS: 34526 HZDR-primary research data are used by this (Id 34525) publication
Downloads
- Secondary publication expected from 19.09.2023
Laser-induced ionization with liquid metal ion sources and two-color sculpted laser fields
F. Machalett, B. Ying, P. Wustelt, L. Bischoff, N. Klingner, W. Pilz, M. Kübel, A. M. Sayler, T. Stöhlker, G. G. Paulus
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 34427) publication
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Contribution to external collection
in: Jahresbericht Helmholtz-Institut Jena 2021, Jena: Helmholtz-Institut Jena, Fröbelstieg, 2022, 60-60
Sustainable Bioengineering of Gold Structured Wide-Area Supported Catalysts for Hand-Recyclable Ultra-Efficient Heterogeneous Catalysis
C. S. Bhatt, D. S. Parimi, T. K. Bollu, H. U. Madhura, N. Jacob, R. Korivi, S. S. Ponugoti, S. Mannathan, S. Ojha, N. Klingner, M. Motapothula, A. K. Suresh
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 34270) publication
Dysprosium Liquid Metal Alloy Ion Source For Magnetic Nanostructures
L. Bischoff, N. Klingner, P. Mazarov, K. Lenz, R. Narkovic, W. Pilz, F. Meyer
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 34127) publication
Quantitative nanoscale imaging using transmission He ion channelling contrast: Proof-of-concept and application to study isolated crystalline defects
S. Tabean, M. Mousley, C. Pauly, O. de Castro, E. Serralta Hurtado De Menezes, N. Klingner, G. Hlawacek, T. Wirtz, S. Eswara
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 32753) publication
2021
Probing ultrafast laser plasma processes inside solids with resonant small angle X-ray scattering
L. Gaus, L. Bischoff, M. Bussmann, E. Cunningham, C. B. Curry, Juncheng E, E. Galtier, M. Gauthier, A. Laso García, M. Garten, S. Glenzer, J. Grenzer, C. Gutt, N. Hartley, L. Huang, U. Hübner, D. Kraus, H. J. Lee, E. E. McBride, J. Metzkes-Ng, B. Nagler, M. Nakatsutsumi, J. Nikl, M. Ota, A. Pelka, I. Prencipe, L. Randolph, M. Rödel, Y. Sakawa, H.-P. Schlenvoigt, M. Smid, F. Treffert, K. Voigt, K. Zeil, T. Cowan, U. Schramm, T. Kluge
Related publications
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Resonant SAXS data used in publication: "Probing ultrafast laser plasma …
ROBIS: 33444 HZDR-primary research data are used by this (Id 33470) publication
The npSCOPE: a new multimodal instrument for in-situ correlative analysis of nanoparticles
O. de Castro, A. Biesemeier, E. Serralta Hurtado De Menezes, O. Bouton, R. Barrahma, Q. Hung Hoang, S. Cambier, T. Taubitz, N. Klingner, G. Hlawacek
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 32658) publication
High brightness ion sources for laser-induced ionization of metal and metalloid ions
F. Machalett, B. Ying, P. Wustelt, V. Huth, L. Bischoff, N. Klingner, M. Kübel, A. M. Sayler, T. Stöhlker, G. G. Paulus
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 32639) publication
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Contribution to external collection
in: Jahresbericht 2020 des Helmholtz-Instituts Jena, Jena: Helmholtz-Institut Jena, 2021
Downloads
Nano-hillock formation on CaF2 due to individual slow Au-cluster impacts
G. L. Szabo, M. Lehner, L. Bischoff, W. Pilz, U. Kentsch, F. Aumayr, N. Klingner, R. A. Wilhelm
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 31759) publication
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Nanotechnology 32(2021), 355701
Cited 3 times in Scopus -
Lecture (Conference)
(Online presentation)
EUROMAT 2021, 12.-16.09.2021, Online, Online
Contact
Dr. Nico Klingner
Focused Ion Beams (FIB) including SEM, LMAIS, GFIS (HIM) and ECR Plasma
n.klingnerhzdr.de
Phone: +49 351 260 2524
+49 351 260 3676
Dr. Lothar Bischoff
Nanostructures by focused electrons and ions
Liquid Metal Alloy Ion Sources
Ion Induced Nanostructures
l.bischoffhzdr.de
Phone: +49 351 260 2866
+49 351 260 2963
