Porträt Dr. Hlawacek, Gregor; FWIZ-N

Dr. Gregor Hlawacek

Ion Microscopy
Ion Induced Nanostructures
Phone: +49 351 260 3409

Ion Induced Nanostructures

We study processes during the interaction of low energy (10 eV – 50 keV) ions with different charge states with materials, especially for the controlled modification and nano-patterning of their surfaces. Such modifications can be material removal through sputtering of surface atoms but also near surface ion beam mixing, ion beam induced defect engineering, or implantation of guest atoms (see figure below). Bottom up as well as top down surface structuring can be achieved through the use of either broad beam irradiation or focused ion beam irradiation.

The first one allows to roughen, smoothen, or clean technical surfaces. Furthermore, the energy deposited by the continuous ion impact drives the surface out of equilibrium inducing many processes on the surface and the sub-surface region.


Ioneninduzierte Oberflächenprozesse

Alternatively, focused ion beams allow the top down structuring of surfaces or surface near regions with a high spatial resolution compatible with modern nanostructure fabrication requirements. In our group we employ a wide range of focused ion beams from very light nobel gas ions to small heavy ion clusters to understand the behaviour of materials and create state-of-the-art nanostructures.

Main research topics:

Foto: A silicon surface after 500 eV Ar+ sputtering under 67° ©Copyright: Dr. Stefan Facsko

Ion-induced pattern formation and surface analytics on the nanoscale

Information about surface modification by low-energy ion irradiation and surface analytics by spectroscopy and scanning probe techniques
Foto: liquid metal ion source ©Copyright: Dr. Lothar Bischoff

Focused Ion Beams

Information about the development and application of focused ion beams using liquid metal alloy ion sources
Foto: HIM Trimer ©Copyright: Gregor Hlawacek

Helium Ion Microscopy

Information about Helium Ion Microscopy with special emphasis on the Orion NanoFab installed at the HZDR.

Group information:

Group Members - Ion Induced Nanostructures

Current and former group members

Recent publications

Older publications can be found in the database (longer loading time)


General Colloidal Synthesis of Transition-Metal Disulfide Nanomaterials as Electrocatalysts for Hydrogen Evolution Reaction

C. Meerbach, B. Klemmed, D. Spittel, C. Bauer, Y. J. Park, R. Hübner, H. Y. Jeong, D. Erb, H. S. Shin, V. Lesnyak, A. Eychmüller

Formation of Thin NiGe Films by Magnetron Sputtering and Flash Lamp Annealing

V. Begeza, E. Mehner, H. Stöcker, Y. Xie, A. García, R. Hübner, D. Erb, S. Zhou, L. Rebohle

Conductive ITO interfaces for optoelectronic applications based on highly ordered inverse opal thin films

L. Galle, S. Ehrling, S. Lochmann, S. Kaskel, L. Bischoff, J. Grothe

Sputtering of nanostructured tungsten and comparison to modelling with TRI3DYN

R. Stadlmayr, P. S. Szabo, D. Mayer, C. Cupak, T. Dittmar, L. Bischoff, S. Möller, M. Rasinski, R. A. Wilhelm, W. Möller, F. Aumayr


  • Secondary publication expected from 07.02.2021

Boron Liquid Metal Alloy Ion Sources for Special FIB Applications

L. Bischoff, N. Klingner, P. Mazarov, W. Pilz, F. Meyer


Morphology modification of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm

X. Xu, K.-H. Heinig, W. Möller, H.-J. Engelmann, N. Klingner, A. Gharbi, R. Tiron, J. Borany, G. Hlawacek



Strain Anisotropy and Magnetic Domains in Embedded Nanomagnets

M. Nord, A. Semisalova, A. Kákay, G. Hlawacek, I. Maclaren, V. Liersch, O. Volkov, D. Makarov, G. W. Paterson, K. Potzger, J. Lindner, J. Faßbender, D. Mcgrouther, R. Bali

Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns

M. Mousley, S. Eswara, O. de Castro, O. Bouton, N. Klingner, C. T. Koch, G. Hlawacek, T. Wirtz

Lithium Ion Beams from Liquid Metal Alloy Ion Sources

W. Pilz, P. Mazarov, N. Klingner, S. Bauerdick, L. Bischoff


Time-of-flight secondary ion mass spectrometry in the helium ion microscope

N. Klingner, R. Heller, G. Hlawacek, S. Facsko, J. von Borany



Dr. Gregor Hlawacek

Ion Microscopy
Ion Induced Nanostructures
Phone: +49 351 260 3409