Helium Ion Microscopy

Helium Ion Microscopy (HIM) is an advanced focus ion beam technology that allows imaging and nano fabrication of conductive as well as insulating materials with unprecendented resolution.

Basics

HIM utilizes a the apex of a tungsten tip to ionize noble gas atoms. Shaping the tip on the atomic level allows to use only the last three atoms of the apex for this purpose. This trimer and apertures in the ion optical column lead to a source size of only 0.25 nm which results in a beam spot with a diameter of only 0.5 nm. Currently the gas can either be He or Ne. While the former is mostly used for imaging the later allows high resolution nano fabrication.

Instrumentation

0.5 nm He beam 10-35 keV
2 nm Ne beam 5-25 keV
GIS injection system for IBID (W(Co)₆, HRD, XeF₂)
In-situ backscatter spectrometry and secondary ion mass spectrometry (50 nm lateral resolution)
4 Kleindiek MM3A micromanipulators
Heating stage (<500°C)


Orion NanoFab	HIM Trimer
Foto: Carl Zeiss	Foto: Gregor Hlawacek
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Applications

high resolution imaging	nanofabrication
semiconductors materials science polymers (uncoated) biological samples (uncoated) materials for catalysis seconday ion mass spectrometry	metal free TEM lamella peraration creation of nanopores localized Noble gas implantation plasmonic applications ion beam mixing

Current projects

GoFIB (05/2022-04/2025)

Gallium oxide is a novel ultra-wide band gap material, and the rationale is that its thin film fabrication technology is immature. In particular, the metastability conditions are difficult to control during sequential deposition of different polymorphs with existing techniques. However, the polymorphism may turn into a significant advantage if one can gain control over the polymorph multilayer and nanostructure design. Our objective is to develop a method for the controllable solid state polymorph conversion of gallium oxide assisted by ion irradiation, capitalizing on encouraging preliminary data. This fabrication method may pave the way for several potential applications (e.g. in power electronics, optoelectronics, thermoelectricity, batteries) and we will test the corresponding functionalities during the project. Thus, we envisage multiple positive impacts and potential benefits across a wide range of stakeholders.

FIT4NANO (04/2020-10/2024)

The aim of the Action is to create a coordinated effort in the field of ion beam based nanoengineering that will put European researchers and commercial businesses at the forefront of the quickly moving field of functional nanostructured materials. The Action will unite developers and practitioners of focused ion beam technology to enable them to build the most efficient tool sets and application techniques for the identification, fabrication and characterization of next generation functional nanomaterials. The Action will develop ion sources and instrumentation for the sub 10 nm fabrication and materials analysis. These objectives will be reached through Europe wide networking between researchers from theoretical and experimental groups traditionally not interacting closely. The challenge to overcome is the increasing fragmentation of the FIB landscape between operators of established technologies, developers providing new techniques and methods and designers of functional nanomaterials not aware of the possibilities provided by these emerging focused ion beam technology and methods.

npSCOPE (01/2017-12/2020)

Within the npSCOPE project, a new instrument that couples the extraordinarily high resolution obtained with the finely focussed ion beam provided by a Gas Field Ion Source with sensors for composition (by mass spectrometry) and 3D visualisation (by transmission ion microscopy) will be developed. The tool will allow for an extensive characterisation of individual nanoparticles and their exact location in a given environment (tissue, cells, etc.) leading to a better understanding of their potential risks for human health and/or the environment. Hard- and software based on correlative microscopy approaches along with optimized sample-handling methods will therefore be developed to obtain a complete physico-chemical characterization of nanoparticles.

picoFIB (05/2017-04/2020)

The PicoFIB Network brings together international researchers with an interest in material manipulation and characterisation using novel gas-ion patterning and microscopy. It provides a foundation for knowledge exchange, technical training and research development. Outputs find application across the fields of nano-devices, energy technology and bio-materials. It comprises a series of exchange visits, training events and international workshops.

IONS4SET (02/2016-07/2020)

This projected, which started in February 2016, is aimed at the fabrication of a CMOS compatible single electron transistor that works at room temperature. This bold goal will be achieved by a combination of nanofabrication tehcniques and ion beam techniques. The HIM plays a leading role in this context as we will demonstrate that using the nanosized beam of the HIM we can form a single silicon nano cluster inside a burried SiO₂ layer. After the nano sized beam of the HIM has been used to locally mix Si into SiO₂ the cluster formation will be completed by a thermal treatment.

Analytical Ion Microscopy (finished)

This project led to the development of the worlds first backscatter time of flight spectrometer for the helium ion microscope. The achieved lateral resolution of 50 nm sets new standards for imaging backscatter spectrometry. The design of the spectrometer is such that it is minimal invasive to the microscope and hence ensures that the key performance parameters of the instruments are not influenced in a negative way. In addition the setup can be used for secondary ion mass spectrometry with an even better lateral resolution.

Publications

Recent publications

All publications

2026

Field-driven vortex pinning and flux quantization effects in W–C complex superconducting arrays using 3D nanoprinting

A. Arroyo-Fructuoso, G. Hlawacek, V. M. Fomin, R. Córdoba

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

DOI: 10.17815/jlsrf-3-159 is cited by this (Id 42384) publication
Data publication: Field-driven vortex pinning and flux quantization effects in …
ROBIS: 42568 HZDR-primary research data are used by this (Id 42384) publication

APL Quantum 3(2026), 016108

Permalink: https://www.hzdr.de/publications/Publ-42384

Optical absorption and emission in nitrogen-implanted Ga2O3 controlled by dynamic defect annealing

A. Azarov, A. Galeckas, U. Bektas, G. Hlawacek, A. Kuznetsov

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

DOI: 10.17815/jlsrf-3-159 is cited by this (Id 42307) publication

Advanced Optical Materials (2026), e03595

Downloads

Open Access Version from doi.org

Permalink: https://www.hzdr.de/publications/Publ-42307

Defect Analysis of the Beta- to Gamma-Ga2O3 phase transition

U. Bektas, M. O. Liedke, H. Liu, F. Ganss, M. Butterling, N. Klingner, R. Hübner, I. Makkonen, A. Wagner, G. Hlawacek

Involved research facilities

Radiation Source ELBE DOI: 10.17815/jlsrf-2-58
Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

DOI: 10.17815/jlsrf-2-58 is cited by this (Id 41946) publication
DOI: 10.17815/jlsrf-3-159 is cited by this (Id 41946) publication
Defect Analysis of the Beta- to Gamma-Ga2O3 phase transition
ROBIS: 41066 HZDR-primary research data are used by this (Id 41946) publication
Defect Analysis of the Beta- to Gamma-Ga2O3 phase transition
RODARE: 3706 HZDR-primary research data are used by this (Id 41946) publication

Advanced Functional Materials (2026), e09688

Permalink: https://www.hzdr.de/publications/Publ-41946

2025

Confinement driven spin-texture evolution in directly written nanomagnets

M. S. Anwar, I. Zelenina, P. Sobieszczyk, G. Hlawacek, K. Tveitstøl, K. Potzger, J. Faßbender, O. Hellwig, J. Lindner, M. Krupiński, M. Nord, R. Bali

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

DOI: 10.17815/jlsrf-3-159 is cited by this (Id 41714) publication
Data publication: Confinement driven spin-texture evolution in directly …
ROBIS: 41716 HZDR-primary research data are used by this (Id 41714) publication

Advanced Functional Materials 35(2025)49, 13904

Permalink: https://www.hzdr.de/publications/Publ-41714

Characterizing Interlayer Excitons by Spectral Signature in Scattering Visible Near-Field Microscopy

O. Garrity, I. Niehues, A. Bergmann-Iwe, A. Wróblewska, L. Pirker, A. Bukhari, G. Hlawacek, T. Korn, O. Frank, P. Kusch

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

DOI: 10.17815/jlsrf-3-159 is cited by this (Id 41685) publication

The Journal of Physical Chemistry Letters 16(2025), 6960-6967
Cited 2 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-41685

High-Resolution Correlative Microscopy Approach for Nanobio Interface Studies of Nanoparticle-Induced Lung Epithelial Cell Damage

R. Podlipec, L. Pirker, A. Krišelj, G. Hlawacek, A. Gianoncelli, P. Pelicon

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

DOI: 10.17815/jlsrf-3-159 is cited by this (Id 39945) publication
Data publication: Novel correlative microscopy approach for nano-bio interface …
ROBIS: 40160 HZDR-primary research data are used by this (Id 39945) publication

ACS Nano 19(2025)19, 18227-18243
Cited 3 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-39945

Programmable activation of quantum emitters in high-purity silicon with focused carbon ion beams

M. Hollenbach, N. Klingner, P. Mazarov, W. Pilz, A. Nadzeyka, F. Mayer, N. V. Abrosimov, L. Bischoff, G. Hlawacek, M. Helm, G. Astakhov

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

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DOI: 10.17815/jlsrf-3-159 is cited by this (Id 39025) publication
Data publication: Programmable activation of quantum emitters in high-purity …
ROBIS: 39026 HZDR-primary research data are used by this (Id 39025) publication

Advanced Quantum Technologies 8(2025), 2400184
Cited 1 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-39025

2024

Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin ﬁlms: a com- parison with Ga+ and e− beams

L. Herrer, A. Salvador-Porroche, G. Hlawacek, P. Cea, J. María De Teresa

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

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DOI: 10.17815/jlsrf-3-159 is cited by this (Id 39806) publication
Data publication: Current vs voltage raw data
ROBIS: 39808 HZDR-primary research data are used by this (Id 39806) publication
Data publication: Fabrication of palladium-enriched metallic structures by …
ROBIS: 39807 HZDR-primary research data are used by this (Id 39806) publication

Nanoscale 45(2024)16, 21128-21137
Cited 2 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-39806

Focused electron beam induced deposition of magnetic tips for improved magnetic force microscopy

A. T. Escalante-Quiceno, V. V. Fernández, J. I. Martín, A. Hierro-Rodriguez, G. Hlawacek, M. Jaafar, A. Asenjo, C. Magén, J. M. de Teresa

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

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DOI: 10.17815/jlsrf-3-159 is cited by this (Id 39804) publication

Low Temperature Physics 50(2024), 919-927
Cited 1 times in Scopus

Downloads

Fulltext from doi.org

Permalink: https://www.hzdr.de/publications/Publ-39804

Studies of the morphology of hematite synthesized from waste iron sulfate

K. Splinter, R. Möckel, G. Hlawacek, Z. Lendzion-Bielun

Molecules 29(2024)15, 3527
Cited 1 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-39174

Tuning the Electronic Characteristics of Monolayer MoS2-Based Transistors by Ion Irradiation: The Role of the Substrate

Z. Fekri, P. Chava, G. Hlawacek, M. Ghorbani Asl, S. Kretschmer, W. Awan, V. Koladi Mootheri, N. Sycheva, A. George, A. Turchanin, K. Watanabe, T. Taniguchi, M. Helm, A. Krasheninnikov, A. Erbe

Involved research facilities

Ion Beam Center DOI: 10.17815/jlsrf-3-159

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DOI: 10.17815/jlsrf-3-159 is cited by this (Id 39152) publication
Data publication: Tuning the Electronic Characteristics of Monolayer …
ROBIS: 39191 HZDR-primary research data are used by this (Id 39152) publication

Advanced Electronic Materials 10(2024)9, 2400037
Cited 6 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-39152

Contribution of black carbon and desert dust to aerosol absorption in the atmosphere of the Eastern Arabian Peninsula

M. M. K. Mahfouz, G. Skok, J. Sciare, M. Pikridas, M. Rami Alfarra, S. Moosakutty, B. Alfoldy, M. Ivančič, M. Rigler, A. Gregorič, R. Podlipec, S. Lohmann, G. Hlawacek, R. Heller, E. Tutsak, G. Močnik

Involved research facilities