Helium Ion Microscopy
Helium Ion Microscopy (HIM) is an advanced focus ion beam technology that allows imaging and nano fabrication of conductive as well as insulating materials with unprecendented resolution.
Basics
HIM utilizes a the apex of a tungsten tip to ionize noble gas atoms. Shaping the tip on the atomic level allows to use only the last three atoms of the apex for this purpose. This trimer and apertures in the ion optical column lead to a source size of only 0.25 nm which results in a beam spot with a diameter of only 0.5 nm. Currently the gas can either be He or Ne. While the former is mostly used for imaging the later allows high resolution nano fabrication.
Instrumentation
- 0.5 nm He beam 10-35 keV
- 2 nm Ne beam 5-25 keV
- GIS injection system for IBID (W(Co)6, HRD, XeF2)
- In-situ backscatter spectrometry and secondary ion mass spectrometry (50 nm lateral resolution)
- 4 Kleindiek MM3A micromanipulators
- Heating stage (<500°C)
Orion NanoFab | HIM Trimer |
Foto: Carl Zeiss | Foto: Gregor Hlawacek |
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Applications
high resolution imaging | nanofabrication |
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Current projects
FIT4NANO (04/2020-10/2024)
The aim of the Action is to create a coordinated effort in the field of ion beam based nanoengineering that will put European researchers and commercial businesses at the forefront of the quickly moving field of functional nanostructured materials. The Action will unite developers and practitioners of focused ion beam technology to enable them to build the most efficient tool sets and application techniques for the identification, fabrication and characterization of next generation functional nanomaterials. The Action will develop ion sources and instrumentation for the sub 10 nm fabrication and materials analysis. These objectives will be reached through Europe wide networking between researchers from theoretical and experimental groups traditionally not interacting closely. The challenge to overcome is the increasing fragmentation of the FIB landscape between operators of established technologies, developers providing new techniques and methods and designers of functional nanomaterials not aware of the possibilities provided by these emerging focused ion beam technology and methods.
npSCOPE (01/2017-12/2020)
Within the npSCOPE project, a new instrument that couples the extraordinarily high resolution obtained with the finely focussed ion beam provided by a Gas Field Ion Source with sensors for composition (by mass spectrometry) and 3D visualisation (by transmission ion microscopy) will be developed. The tool will allow for an extensive characterisation of individual nanoparticles and their exact location in a given environment (tissue, cells, etc.) leading to a better understanding of their potential risks for human health and/or the environment. Hard- and software based on correlative microscopy approaches along with optimized sample-handling methods will therefore be developed to obtain a complete physico-chemical characterization of nanoparticles.
picoFIB (05/2017-04/2020)
The PicoFIB Network brings together international researchers with an interest in material manipulation and characterisation using novel gas-ion patterning and microscopy. It provides a foundation for knowledge exchange, technical training and research development. Outputs find application across the fields of nano-devices, energy technology and bio-materials. It comprises a series of exchange visits, training events and international workshops.
IONS4SET (02/2016-07/2020)
This projected, which started in February 2016, is aimed at the fabrication of a CMOS compatible single electron transistor that works at room temperature. This bold goal will be achieved by a combination of nanofabrication tehcniques and ion beam techniques. The HIM plays a leading role in this context as we will demonstrate that using the nanosized beam of the HIM we can form a single silicon nano cluster inside a burried SiO2 layer. After the nano sized beam of the HIM has been used to locally mix Si into SiO2 the cluster formation will be completed by a thermal treatment.
Analytical Ion Microscopy (finished)
This project led to the development of the worlds first backscatter time of flight spectrometer for the helium ion microscope. The achieved lateral resolution of 50 nm sets new standards for imaging backscatter spectrometry. The design of the spectrometer is such that it is minimal invasive to the microscope and hence ensures that the key performance parameters of the instruments are not influenced in a negative way. In addition the setup can be used for secondary ion mass spectrometry with an even better lateral resolution.
Publications
Recent publications
All publications
2025
Programmable activation of quantum emitters in high-purity silicon with focused carbon ion beams
M. Hollenbach, N. Klingner, P. Mazarov, W. Pilz, A. Nadzeyka, F. Mayer, N. V. Abrosimov, L. Bischoff, G. Hlawacek, M. Helm, G. Astakhov
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 39025) publication
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Data publication: Programmable activation of quantum emitters in high-purity …
ROBIS: 39026 HZDR-primary research data are used by this (Id 39025) publication
Permalink: https://www.hzdr.de/publications/Publ-39025
2024
Fabrication of palladium-enriched metallic structures by direct focused He+ and Ne+ beam nanowriting from organometallic thin films: a com- parison with Ga+ and e− beams
L. Herrer, A. Salvador-Porroche, G. Hlawacek, P. Cea, J. María De Teresa
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 39806) publication
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Data publication: Current vs voltage raw data
ROBIS: 39808 HZDR-primary research data are used by this (Id 39806) publication -
Data publication: Fabrication of palladium-enriched metallic structures by …
ROBIS: 39807 HZDR-primary research data are used by this (Id 39806) publication
Permalink: https://www.hzdr.de/publications/Publ-39806
Focused electron beam induced deposition of magnetic tips for improved magnetic force microscopy
A. T. Escalante-Quiceno, V. V. Fernández, J. I. Martín, A. Hierro-Rodriguez, G. Hlawacek, M. Jaafar, A. Asenjo, C. Magén, J. M. de Teresa
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 39804) publication
Downloads
Permalink: https://www.hzdr.de/publications/Publ-39804
Studies of the morphology of hematite synthesized from waste iron sulfate
K. Splinter, R. Möckel, G. Hlawacek, Z. Lendzion-Bielun
Permalink: https://www.hzdr.de/publications/Publ-39174
Tuning the Electronic Characteristics of Monolayer MoS2-Based Transistors by Ion Irradiation: The Role of the Substrate
Z. Fekri, P. Chava, G. Hlawacek, M. Ghorbani Asl, S. Kretschmer, W. Awan, V. Koladi Mootheri, N. Sycheva, A. George, A. Turchanin, K. Watanabe, T. Taniguchi, M. Helm, A. Krasheninnikov, A. Erbe
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 39152) publication
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Data publication: Tuning the Electronic Characteristics of Monolayer …
ROBIS: 39191 HZDR-primary research data are used by this (Id 39152) publication
Permalink: https://www.hzdr.de/publications/Publ-39152
Contribution of black carbon and desert dust to aerosol absorption in the atmosphere of the Eastern Arabian Peninsula
M. M. K. Mahfouz, G. Skok, J. Sciare, M. Pikridas, M. Rami Alfarra, S. Moosakutty, B. Alfoldy, M. Ivančič, M. Rigler, A. Gregorič, R. Podlipec, S. Lohmann, G. Hlawacek, R. Heller, E. Tutsak, G. Močnik
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 38810) publication
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Data publication: Contribution of black carbon and desert dust to aerosol …
ROBIS: 40158 HZDR-primary research data are used by this (Id 38810) publication
Downloads
Permalink: https://www.hzdr.de/publications/Publ-38810
Ultralong-term high-density data storage with atomic defects in SiC
M. Hollenbach, C. Kasper, D. Erb, L. Bischoff, G. Hlawacek, H. Kraus, W. Kada, T. Ohshima, M. Helm, S. Facsko, V. Dyakonov, G. Astakhov
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 38750) publication
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Data publication: Ultralong-term high-density data storage with atomic defects …
ROBIS: 38751 HZDR-primary research data are used by this (Id 38750) publication
Permalink: https://www.hzdr.de/publications/Publ-38750
Defects distribution and evolution in selected-area helium ion implanted 4H-SiC
Y. Song, Z. Xu, M. Rommel, G. Astakhov, G. Hlawacek, F. Fang
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 37512) publication
Downloads
- Final Draft PDF 2,1 MB Secondary publication
Permalink: https://www.hzdr.de/publications/Publ-37512
2023
Roadmap for focused ion beam technologies
K. Höflich, G. Hobler, F. I. Allen, T. Wirtz, G. Rius, A. Krasheninnikov, M. Schmidt, I. Utke, N. Klingner, M. Osenberg, L. McElwee-White, R. Córdoba, F. Djurabekova, I. Manke, P. Moll, M. Manoccio, J. M. de Teresa, L. Bischoff, J. Michler, O. de Castro, A. Delobbe, P. Dunne, O. V. Dobrovolskiy, N. Freese, A. Gölzhäuser, P. Mazarov, D. Koelle, W. Möller, F. Pérez-Murano, P. Philipp, F. Vollnhals, G. Hlawacek
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 37049) publication
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Applied Physics Reviews 10(2023)4, 041311
arXiv: 2305.19631
Cited 29 times in Scopus -
Poster
Eu-F-N workshop, 07.-09.06.2023, Zürich, Schweiz -
Poster
FIT4NANO workshop, 17.-19.07.2023, Lisbon, Portugal -
Poster
AVS69, 05.-10.11.2023, Portland, USA -
Invited lecture (Conferences) (Online presentation)
FIB FIG User meeting, 17.04.2024, online, USA -
Lecture (Conference)
67th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN 2024, 28.-31.05.2024, La Jolla, USA
Permalink: https://www.hzdr.de/publications/Publ-37049
Universal radiation tolerant semiconductor
A. Azarov, J. G. Fernández, J. Zhao, F. Djurabekova, H. He, R. He, Ø. Prytz, L. Vines, U. Bektas, P. Chekhonin, N. Klingner, G. Hlawacek, A. Kuznetsov
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 36900) publication
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Data publication: Universal radiation tolerant semiconductor
ROBIS: 37095 HZDR-primary research data are used by this (Id 36900) publication
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Nature Communications 14(2023), 4855
arXiv: 2303.13114
Cited 36 times in Scopus
Downloads
Permalink: https://www.hzdr.de/publications/Publ-36900
Direct magnetic manipulation of a permalloy nanostructure by a focused cobalt ion beam
J. Pablo-Navarro, N. Klingner, G. Hlawacek, A. Kakay, L. Bischoff, R. Narkovic, P. Mazarov, R. Hübner, F. Meyer, W. Pilz, J. Lindner, K. Lenz
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 36822) publication
Downloads
- Secondary publication expected
Permalink: https://www.hzdr.de/publications/Publ-36822
Transport properties of Fe60Al40 during the B2 to A2 structural phase transition
S. Sorokin, M. S. Anwar, G. Hlawacek, R. Boucher, J. Salgado Cabaco, K. Potzger, J. Lindner, J. Faßbender, R. Bali
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 36384) publication
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Data to the paper "Transport properties of Fe60Al40 during the B2 to A2 …
ROBIS: 36375 HZDR-primary research data are used by this (Id 36384) publication -
Data to the paper "Transport properties of Fe60Al40 during the B2 to A2 …
RODARE: 2102 HZDR-primary research data are used by this (Id 36384) publication
Permalink: https://www.hzdr.de/publications/Publ-36384
Deterministic multi-level spin orbit torque switching using focused He+ ion beam irradiation
J. Kurian, A. Joseph, S. Cherifi-Hertel, C. Fowley, G. Hlawacek, P. Dunne, M. Romeo, G. Atcheson, J. M. D. Coey, B. Doudin
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 35950) publication
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Pattering data from NPVE software for Helium Ion Microscopy (HIM) irradiation …
ROBIS: 36030 HZDR-primary research data are used by this (Id 35950) publication -
Pattering data from NPVE software for Helium Ion Microscopy (HIM) irradiation …
RODARE: 2055 HZDR-primary research data are used by this (Id 35950) publication
Permalink: https://www.hzdr.de/publications/Publ-35950
Tailoring crosstalk between localized 1D spin-wave nanochannels using focused ion beams
V. Iurchuk, J. Pablo-Navarro, T. Hula, R. Narkovic, G. Hlawacek, L. Körber, A. Kakay, H. Schultheiß, J. Faßbender, K. Lenz, J. Lindner
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 35208) publication
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Data publication : Tailoring crosstalk between localized 1D spin-wave …
ROBIS: 36217 HZDR-primary research data are used by this (Id 35208) publication -
Data publication : Tailoring crosstalk between localized 1D spin-wave …
RODARE: 2070 HZDR-primary research data are used by this (Id 35208) publication
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Contribution to WWW
https://arxiv.org/abs/2209.13180 -
Scientific Reports 13(2023)1, 764
Cited 2 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-35208
CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications
J. Borany, H.-J. Engelmann, K.-H. Heinig, E. Amat, G. Hlawacek, F. Klüpfel, R. Hübner, W. Möller, M.-L. Pourteau, G. Rademaker, M. Rommel, L. Baier, P. Pichler, F. Perez-Murano, R. Tiron
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 34842) publication
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Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si …
ROBIS: 34906 HZDR-primary research data are used by this (Id 34842) publication
Permalink: https://www.hzdr.de/publications/Publ-34842