SiC SynthesisSiC-crystals can be formed as a buried layer within Si substrates by C+ ion implantation into Si. A pre-stage of SiC formation has been detected by TEM  and XRD .
The SiC layer can be separated by etching-off the Si matrix. Stable SiC membranes with excellent surface flatness are formed in this way . The surface of such layers can be used as a seed to produce "thick" SiC layers by CVD on Si or SiO2 substates .
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