Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationComputer simulation and RBS/C studies of high-dose N + and Al + co-implantation in 6H-SiC
Kharlamov, V. S.; Kulikov, D. V.; Truschin, Y. V.; Tsigankov, D. N.; Voelskow, M.; Skorupa, W.; Pezoldt, J.
Abstract
Computer simulation and RBS/C studies of high-dose N + and Al + co-implantation in 6H-SiC
Keywords: Computer simulation; RBS; ion implantation; 6H-SiC
- Proceedings of SPIE 3345(1998), 260
Permalink: https://www.hzdr.de/publications/Publ-13754