Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationNanopattering on crystal Ge surfaces
Ou, X.; Grenzer, J.; Facsko, S.
Abstract
In contrast to the nanopattering on amorphous semiconductor surfaces by ion irradiation, nanostructures on crystal Ge surfaces are created by irradiation under the temperatures above the recrystallization temperature. The temperature, fluence and orientation dependence on the nanopattens formation are demonstrated in this talk.
Keywords: irradiation; nanopattern; crystal Ge surface
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 18273) publication
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Sonstiger Vortrag
Forschergruppe 845 project workshop, 07.-08.11.2012, Dresden, Germany
Permalink: https://www.hzdr.de/publications/Publ-18273