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Nanopattering on crystal Ge surfaces

Ou, X.; Grenzer, J.; Facsko, S.

Abstract

In contrast to the nanopattering on amorphous semiconductor surfaces by ion irradiation, nanostructures on crystal Ge surfaces are created by irradiation under the temperatures above the recrystallization temperature. The temperature, fluence and orientation dependence on the nanopattens formation are demonstrated in this talk.

Keywords: irradiation; nanopattern; crystal Ge surface

Beteiligte Forschungsanlagen

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  • Sonstiger Vortrag
    Forschergruppe 845 project workshop, 07.-08.11.2012, Dresden, Germany

Permalink: https://www.hzdr.de/publications/Publ-18273